Experiments in Micro/Nano Science and Engineering
Professor Horacio D. Espinosa*

Spring 2010       T,Th 12:00-1:50pm, Tech M349       Lab Time: TBD
Class website:

RF MEMS switch

In-situ testing
Clean Room Microfabrication
MEMS and Nanotechnology have attracted significant attention in the engineering, chemistry, and biology communities. An important component of this development is experimentation with the ability to manipulate and interrogate matter at small scales. ME 382 is a course design to train students in this area.

The course consists of a series of laboratories including microfluidics experiments, electro-mechanical testing of microdevices, transport and deposition of biomolecules, nanolithography, and manipulation of nano objects. The course is one of the few lab courses offered at NU in which students make extensive use of clean room facilities.

This class meets three times a week, with one for lectures pertinent to the labs and the other two for lab work. Labs will be assigned weekly (see syllabus on the class website). There will be a final project. Prerequisite: ME 381 or instructor consent. This course is particularly suited to both graduate and undergraduate students.
AFM nanopatterning
AFM nano-patterning

Carbon Nanotube
Micro-Image Velocimetry
* Email:, Tel: 7-5989, Office: L286