Experiments in Micro/Nano Science and Engineering
Professor Horacio D. Espinosa*

Spring 2015       T,Th 2:00-3:20pm, Tech LG72       Lab Time: W,F 2:00-6:00pm
Class website:

RF MEMS switch

In-situ testing
Clean Room Microfabrication
MEMS and Nanotechnology have attracted significant attention in the engineering, chemistry and biology communities. An important component of this development is experimentation with the ability to manipulate and interrogate matter at small scales. ME 382 is a course designed to train students in this area.

The course consists of a series of laboratories including microfluidics experiments, electro- mechanical testing of microdevices, transport and deposition of biomolecules, nanolithography, and microfluidics. The course is one of the few lab courses offered at NU in which students make extensive use of clean room facilities (NUFAB).

This class meets three times a week, with a combination of lectures and lab work. Labs will be assigned weekly (see syllabus on the class website). The class ends with a final project selected by the students. This course is particularly suited to both graduate and undergraduate students.
AFM nanopatterning
AFM nano-patterning

Carbon Nanotube
Micro-Image Velocimetry
* Email:, Tel: 7-5989, Office: L286