Lab Handouts
Lab #1. Lithography and Fabrication of PDMS Microchannels (Design of Photomask Using L-Edit)
Lab #2. Microchannel Transport Properties Using Fluorescent Beads and/or DNA Molecules
Lab #3. Introduction to AFM and Dip-Pen Nanolithography
Lab #4. Design of RF MEMS Switches Using ANSYS Multiphysics
Lab #5. Actuation of RF MEMS Switches; Time Response, Signal Characteristics
Lab #6. Nanoindentation of Quartz, Aluminum Single Crystals and Diamond Thin Films
Lab #7. Assessing the Characteristics of Surface and Bulk Micromachined Accelerometers
Final Project #1. Manipulation of Microbeads Using DC/AC Electrical Fields
Final Project #2. Testing of MEMS Materials Using Thermal Actuation, AFM Image Correlation and Capacitance Measurements