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The MEMS/NEMS subgroup focuses on design, fabrication and testing of
integrated electromechanical systems at the micro and nanoscales.
Ongoing methodology and device developments include nanopatterning probes,
nanotube-based switches, ultrananocrystalline diamond cantilevers, in-situ
electron microscopy testing through nanomanipulation and MEMS actuation/sensing.
These developments are based on a combination of science and engineering, and
target novel means for discovery of new scientific phenomena otherwise
unattainable with conventional approaches. Research procedures and results in
this area have a particular relevance to the development of future technologies
and at the same time they are scientifically exciting because they can
potentially change the way interactions between the physical world and human
beings take place. Our long-term goal is to develop integrated micro/nano
systems in the context of discovering novel phenomena, sensors, and tools.
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