In-situ SEM/TEM Testing of Nanotubes, Nanowires and Thin Films
This project focuses on design, fabrication, and testing of a MEMS-based test
stage used for in-situ SEM/TEM mechanical testing of carbon nanotubes (CNTs),
nanowires (NWs) and thin films.
To overcome existing experimental limitations and advance further in the mechanics
of CNTs, NWs, single crystal films and polycrystalline films, new measurement
tools, which can be integrated into high-resolution imaging tools, are required.
MEMS technology offers unique features to meet these requirements, such as
generation of micro-Newton force and sensing of nanometer displacement. We have
developed MEMS devices that can be placed inside electron microscopes and performed
a number of mechanical tests. With the assistance of a
nanomanipulator,
CNTs and NWs are positioned on the MEMS devices for in-situ testing. The in-situ
testing of FCC thin films (Au, Al and Cu) is an ideal extension to the membrane
deflection experiment (MDE) developed by our group. With the ongoing efforts in
atomistic and discrete dislocation modeling, in-situ electron microscopy testing
will help to reveal conditions for the initiation of atomic defects and their
propagation. Ultimately, deformation and failure quantitative models will be
developed for ductile and brittle materials.
GaN nanowire test
Klocke Nanotechnik: Nanomanipulator
Klocke Nanotechnik: Nanofinger
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H.D. Espinosa (PI)
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B. Peng (Graduate Student)
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Y. Zhu, C-H. Ke and H.D. Espinosa.
"Experimental Techniques for the Mechanical Characterization
of Thin Films and One-Dimensional Nanostructures"
Experimental Mechanics, Vol. 47, No. 1, p. 7-24, 2007.
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Y. Zhu, A. Corigliano and H.D. Espinosa.
"A thermal actuator for nanoscale in-situ microscopy testing:
design and characterization".
Journal of Micromechanics and Microengineering, Vol. 16, No. 2, p. 242-253, 2006.
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Y. Zhu and H.D. Espinosa.
" An electromechanical material testing system for in situ
electron microscopy and applications "
Proceedings of the National Academy of Sciences of the USA, Vol. 102, No. 41, p. 14503-14508, 2005.
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Y. Zhu, N. Moldovan and H.D. Espinosa.
"A microelectromechanical load sensor for in situ electron
and x-Ray microscopy tensile testing of nanostructures,"
Applied Physics Letters, Vol. 86, No. 1, Art. No. 013506, 2005.
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H.D. Espinosa and Y. Zhu,
"A Microelectromechanical Device Used for In-Situ Electron Microscopy,
Scanning Probe Microscopy and X-Ray Diffraction Mechanical Testing of
Nanostructures."
NU Disclosure No. 24085, filed in 2004.
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