Cantilevered AFM probes for lithography and biopatterning
This project focuses on development of cantilever arrays for atomic force
microscope (AFM) controlled deposition of chemical and biochemical materials.
High-speed patterning over large areas with the resolution of dip-pen
nanolithography (DPN) is the goal of this research by both removing the need
for repeated dipping as in the DPN technique and by parallelizing the writing.
Our strategy is to combine continuous ink feeding with the DPN technique using
micromachining technology.
We have developed a cantilevered probe chip called the Nano Fountain Probe (NFP)
which can be mounted on commercial AFM equipment for the delivery of liquid
solutions of chemical or biological molecules. The ultimate goal of this
project is to develop a robust microsystem platform for the mass production
of nanoscale devices, sensors and structures using chemicals, biomolecules,
nanoparticles, nanotubes, and nanowires. Microfluidic transport of various
molecular inks to AFM tips, with high throughput, is of main interest since
fluid is a very effective medium for direct delivery of molecules, which
self-assemble on substrates with very specific nanoscale architectures.
NFP chips on a wafer, Cantilevers and Apertured tip of an NFP
Each NFP chip makes use of two separate reservoirs, each connected via
microfluidic channels to six cantilevers. At the end of each cantilever is a
ring-shaped apertured tip consisting of a shell surrounding a core tip. The
solution in the reservoir is driven by capillary action to the dispensing tips,
forming an air-liquid interface at the aperture. Molecules from the interface
diffuse along the core tip to the substrate. NFPs are fabricated on the
wafer-scale using standard surface micromachining processes allowing for batch
fabrication of numerous chips.
Our current efforts include:
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establishing a protocol for the deposition of biomolecules and
nanoparticles through self assembly or electrically driven deposition, and
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computer modeling of fluidic transport and the transport of organic
and/or inorganic molecules from probe tips to the substrate.
The NFP was employed for the direct deposition of hexanethiol-modified
oligonucleotides on a gold substrate. After passivation of the unpatterned
areas, the DNA spots were hybridized with complementary DNA-functionalized gold
nanoparticles demonstrating that the patterned DNA maintained its biological
activity. Features 200-300 nm in diameter were routinely achieved. Successful
delivery of the biomolecules could be verified via AFM, optical dark-field
imaging and scanning electron microscopy (SEM).
Schematic of experimental procedure for DNA patterning: (a) molecular ink
feeding, (b) direct patterning of a Au surface with alkanethiol-modified
oligonucleotides, (c) passivation of the unpatterned areas with C6 thiol to
avoid unspecific binding, (d) hybridization of the linker and probe DNA
strands. C) height profile of the same array, acquired in tapping mode
operation. D) and E) SEM image of dot array and single dot, respectively.
Multiple Au nanoparticles are visible in E).
Gold nanoparticles 10 and 15 nm in diameter were directly delivered by the NFP.
The particles were immobilized via electrostatic interactions to silicon dioxide
surfaced modified to be positively charged. Nanometer-scale dot and line
features were fabricated. The same fountain probe can be used continuously to
deposit the particles for over 40 minutes, with repeatable results. It is
anticipated that the NFP will be able to construct conductive nanowires and other
metal structures in the future.
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H.D. Espinosa (PI)
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Owen Loh (Graduate Student)
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Jee Rim (Postdoc)
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D. Ho (Biomedical and Mechanical Engineering, NU)
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C. Mirkin (Chemistry, NU)
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I. Szleifer (Biomedical Engineering, NU)
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S. O'Brien (SEAS, Columbia University)
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P. Kohli (Chemistry, SIU)
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K.-H. Kim, R.G. Sanedrin, A.M. Ho, S.W. Lee,
N. Moldovan, C.A. Mirkin, H.D. Espinosa,
"Direct Delivery and Submicrometer Patterning
of DNA by a Nanofountain Probe,"
Advanced Materials, Vol. 20, No. 2, p. 330-334, 2008.
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B. Wu, A. Ho, N. Moldovan, H.D. Espinosa,
"Direct Deposition and Assembly of Gold Colloidal
Particles Using a Nanofountain Probe,"
Langmuir, Vol. 23, No. 17, p. 9120-9123, 2007.
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A. Ho, H.D. Espinosa,
"Scanning Probes for the Life Sciences,"
Applied Scanning Probe Methods 8: Scanning Probe
Microscopy Techniques,
Edited by B. Bhushan, H. Fuchs, and T. Masahiko,
Springer-Verlag, Heidelberg, 2008.
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N. Moldovan, K-H. Kim, and H.D. Espinosa.
"Multi-Ink Linear Array of Nanofountain Probes."
Journal of Micromechanics and Microengineering,
Vol. 16, No. 10, p. 1935-1942, 2006.
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H.D. Espinosa, K.-H. Kim, and N. Moldovan,
"Microcantilever-based Nanodevices in the Life Sciences."
Nanotechnologies for the Life Sciences series, Vol.4:
Nanodevices for the Life sciences. Edited by Challa S.S.R. Kumar.
Willey-VCH Publishers, 2006.
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H.D. Espinosa, N. Moldovan, K.-H. Kim,
"Novel AFM Nano Probes."
Applied Scanning Probe Methods, Vol. 5: Scanning Probe
Microscopy Techniques. Edited by B. Bhushan, H. Fuchs, and S. Kawata.
Springer-Verlag, Heidelberg, to be published in 2007.
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N. Moldovan, K.-H. Kim, and H.D. Espinosa,
"Design and Fabrication of a Novel Microfluidic Nanoprobe"
JMEMS, 15 (2006) 204-213.
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K.-H. Kim, N. Moldovan, C. Ke, H.D. Espinosa, X. Xiao,
J.A. Carlisle, and O. Auciello.
"Novel Ultrananocrystalline Diamond Probes for High-
Resolution Low-Wear Nanolithographic Techniques,"
Small, Vol. 1, No. 8-9, pp. 866-874, 2005.
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K.-H. Kim, N. Moldovan, and H.D. Espinosa.
"A Nanofountain Probe with Sub-100 nm Molecular
Writing Resolution,"
Small, Vol. 1, No. 6, pp. 632-635, 2005.
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K.-H. Kim, N. Moldovan, C. Ke and H. D. Espinosa.
"A Novel AFM Chip for Fountain Pen Nanolithography - Design
and Microfabrication,"
Materials Research Society Symposium Proceedings, Vol. 782, 2003,
and Fall MRS Meeting, A5.56.1, 2004.
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H.D. Espinosa, and N.A. Moldovan,
"Scanning Nanodispensing Device Using Cantilevers with
Microchannels and Nanotips- Design and Fabrication."
NU Disclosure No. 25075 (US patent application filed on 2006).
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H.D. Espinosa, N.A. Moldovan and K.-H. Kim,
"Scanning Nanodispensing Device Using Cantilevers with
Microchannels and Nanotips- Design and Fabrication."
NU Disclosure No. 23014 (US patent application USSN
60/455,898, filed on March 19, 2003).
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